Interdigitated Comb Fins

Description:

Interdigitated Comb Fins

 

This technology provides a method of creating interdigitated fins on a planar microstructure that is intended to deflect in the direction normal to its plane. The interdigitated fins consist of one set of fins that are attached to the planar microstructure and move with it as it moves out of plane. The other set of fins are normally attached to a fixed substrate around the perimeter of the planar microstructure. The relative motion between the two sets of fins permits either capacitive actuation or sensing, depending on the purpose of the

planar microstructure.

 

ADVANTAGES:

 Provide a means of achieving a substantial amount of capacitance between the moving and stationary elements

 

 Strengthen the planar microstructure and protect it from stresses during the fabrication process

 

 Introduce minimal viscous damping due to interactions between the structure and the surrounding air

Patent Information:
For Information, Contact:
Scott Hancock
Director, IP Management and Licensing
Binghamton University
(607) 777-5874
shancock@binghamton.edu
Inventors:
Ronald Miles
Weili Cui
Keywords:
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