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Levitating MEMS Switch

Microelectromechanical system (MEMS) switch that can recover from pull-in collapse using electrostatic levitation Technology Overview: A microelectromechanical system (MEMS) switch that can recover from pull-in collapse using electrostatic levitation. The approach is of great utility for any MEMS component that has to recover easily from pull-in,...

Published: 4/26/2024 | Inventor(s): Shahrzad Towfighian, Mark Pallay

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Category(s): Campus > Binghamton University, Technology Classifications > Electronics, Technology Classifications > Engineering