An acoustic sensing device with greater sensitivity and reduced background noise
Technology Overview:
This technology provides an acoustic sensing device or directional microphone having greater sensitivity and reduced noise. The directional microphone or acoustic sensor comprises a rigid, one micron thick polysilicon membrane having dimensions of approximately 1 mm×2 mm. The membrane is supported upon its central axis by beams having torsional and transverse stiffness. The total damped area of the microphone is between approximately 1.5 and 2.5×10−6 m2. The distance between centers of the two sides of the device is approximately 10−3 m. The resonant frequency in the rotational mode is in a range of between approximately 700 to 1,000 Hz, and the resonant frequency of the translational mode is in the range of between approximately 40,000 and 45,000 Hz. The differential microphone is useful in hearing aids, telecommunications equipment, information technology and military applications.
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Intellectual Property Summary:
U.S. 6,788,796
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